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Microelectronic Fabrication Laboratory

 

   

 


List of equipment:

No.
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Equipment
E-beam Lithography
Diffusion Furnace
Film Spectrophometer
High Power Microscope
MIDAS Mask Aligner
PECVD System
Physical Vapor Deposition
Scanning Electron Microscope
Signatone Probe Station
Spin Coater
DCRF Sputter
Laser Mask Writer
Quantity
1 unit
1 unit
1 unit
1 unit
1 unit
1 unit
1 unit
1 unit
1 unit
1 unit
1 unit
1 unit

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Contact Us

School of Microelectronic Engineering
Universiti Malaysia Perlis
Pauh Putra Campus
02600 Arau, Perlis
MALAYSIA
Arau Perlis 02600 Malaysia

Phone: +6049885509/5515

Fax: +6049885510

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